Research Catalog

Methods and materials in microelectronic technology

Title
Methods and materials in microelectronic technology / edited by Joachim Bargon.
Publication
New York : Plenum Press, c1984.

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Details

Additional Authors
Bargon, Joachim.
Description
viii, 367 p. : ill.; 26 cm.
Series Statement
The IBM research symposia series
Alternative Title
Microelectronic technology.
Subjects
Note
  • "Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--T.p. verso.
Bibliography (note)
  • Includes bibliographies and index.
Call Number
JSF 86-1045
ISBN
0306418037
LCCN
84013352
OCLC
  • 10913539
  • NYPG86-B93334
Title
Methods and materials in microelectronic technology / edited by Joachim Bargon.
Imprint
New York : Plenum Press, c1984.
Series
The IBM research symposia series
Bibliography
Includes bibliographies and index.
Added Author
Bargon, Joachim.
Added Title
Microelectronic technology.
Research Call Number
JSF 86-1045
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