Research Catalog

Rapid thermal processing (RTP) of semiconducters in space progress report for 12 month period ending March 31, 1993

Title
Rapid thermal processing (RTP) of semiconducters in space [microform] : progress report for 12 month period ending March 31, 1993 / submitted by T.J. Anderson and K.S. Jones.
Author
Anderson, T. J. (Thomas Jefferson), 1928-
Publication
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1993]

Details

Additional Authors
  • Jones, K. S.
  • United States. National Aeronautics and Space Administration.
Description
1 v.
Series Statement
NASA contractor report ; NASA CR-193110
Subjects
Note
  • Distributed to depository libraries in microfiche.
  • Shipping list no.: 93-1094-M.
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche NAS 1.26:193110
OCLC
marcive30829147
Author
Anderson, T. J. (Thomas Jefferson), 1928-
Title
Rapid thermal processing (RTP) of semiconducters in space [microform] : progress report for 12 month period ending March 31, 1993 / submitted by T.J. Anderson and K.S. Jones.
Imprint
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1993]
Series
NASA contractor report ; NASA CR-193110
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1993] 1 microfiche.
Added Author
Jones, K. S.
United States. National Aeronautics and Space Administration.
Gpo Item No.
0830-H-14 (MF)
Sudoc No.
NAS 1.26:193110
Research Call Number
READEX Microfiche NAS 1.26:193110
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