- Additional Authors
- Description
- 1 v.
- Series Statement
- NASA contractor report ; NASA CR-193110
- Subjects
- Note
- Distributed to depository libraries in microfiche.
- Shipping list no.: 93-1094-M.
- Reproduction (note)
- Call Number
- READEX Microfiche NAS 1.26:193110
- OCLC
- marcive30829147
- Author
Anderson, T. J. (Thomas Jefferson), 1928-
- Title
Rapid thermal processing (RTP) of semiconducters in space [microform] : progress report for 12 month period ending March 31, 1993 / submitted by T.J. Anderson and K.S. Jones.
- Imprint
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1993]
- Series
NASA contractor report ; NASA CR-193110
- Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1993] 1 microfiche.
- Added Author
Jones, K. S.
United States. National Aeronautics and Space Administration.
- Gpo Item No.
0830-H-14 (MF)
- Sudoc No.
NAS 1.26:193110
- Research Call Number
READEX Microfiche NAS 1.26:193110