- Additional Authors
- Description
- iv, 140 p. : ill.; 28 cm.
- Series Statement
- Semiconductor measurement technology
- NIST special publication ; 400-90
- Subject
- Note
- Distributed to depository libraries in microfiche.
- Paper version no longer for sale by the Supt. of Docs.
- Shipping list no.: 92-2218-M.
- "April 1992."
- Bibliography (note)
- Includes bibliographical references (p. 41-42).
- Reproduction (note)
- Call Number
- READEX Microfiche C 13.10:400-90
- ISBN
- 0160367883 (paper copy)
- OCLC
- marcive27018099
- Author
Marshall, J. C. (Janet C.)
- Title
Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 [microform] / J.C. Marshall and R.L. Mattis.
- Imprint
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [1992]
- Series
Semiconductor measurement technology
NIST special publication ; 400-90
- Bibliography
Includes bibliographical references (p. 41-42).
- Reproduction
Microfiche. [Washington, D.C.?] : Supt. of Docs. U.S. G.P.O., [1992] 2 microfiches : negative.
- Added Author
Mattis, Richard L.
National Institute of Standards and Technology (U.S.)
- Gpo Item No.
0247 (MF)
- Sudoc No.
C 13.10:400-90
- Research Call Number
READEX Microfiche C 13.10:400-90