Research Catalog

Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2

Title
Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 [microform] / J.C. Marshall and R.L. Mattis.
Author
Marshall, J. C. (Janet C.)
Publication
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [1992]

Details

Additional Authors
Description
iv, 140 p. : ill.; 28 cm.
Series Statement
  • Semiconductor measurement technology
  • NIST special publication ; 400-90
Subject
Note
  • Distributed to depository libraries in microfiche.
  • Paper version no longer for sale by the Supt. of Docs.
  • Shipping list no.: 92-2218-M.
  • "April 1992."
Bibliography (note)
  • Includes bibliographical references (p. 41-42).
Reproduction (note)
  • Microfiche.
Call Number
READEX Microfiche C 13.10:400-90
ISBN
0160367883 (paper copy)
Author
Marshall, J. C. (Janet C.)
Title
Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 [microform] / J.C. Marshall and R.L. Mattis.
Imprint
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [1992]
Series
Semiconductor measurement technology
NIST special publication ; 400-90
Bibliography
Includes bibliographical references (p. 41-42).
Reproduction
Microfiche. [Washington, D.C.?] : Supt. of Docs. U.S. G.P.O., [1992] 2 microfiches : negative.
Added Author
Mattis, Richard L.
National Institute of Standards and Technology (U.S.)
Gpo Item No.
0247 (MF)
Sudoc No.
C 13.10:400-90
Research Call Number
READEX Microfiche C 13.10:400-90
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